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Mikrosystemtechnik Fur Ingenieure

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Pages: 453

Book format: An electronic version of a printed book that can be read on a computer or handheld device designed specifically for this purpose.

Publisher: Date:5/15/1997 - Wiley-VCH Verlag GmbH

By: W. Menz

This completely revised edition of the first concise introduction to microsystems technology includes the latest trends of this emerging scientific discipline. Especially the chapters on silicium and LIGA technology are severely expanded. New topics include application aspects in medicine and health technology, lithography and electroplating.

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